JPS626517Y2 - - Google Patents

Info

Publication number
JPS626517Y2
JPS626517Y2 JP1983041200U JP4120083U JPS626517Y2 JP S626517 Y2 JPS626517 Y2 JP S626517Y2 JP 1983041200 U JP1983041200 U JP 1983041200U JP 4120083 U JP4120083 U JP 4120083U JP S626517 Y2 JPS626517 Y2 JP S626517Y2
Authority
JP
Japan
Prior art keywords
temperature
test
refrigerant
container
test material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983041200U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5934347U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4120083U priority Critical patent/JPS5934347U/ja
Publication of JPS5934347U publication Critical patent/JPS5934347U/ja
Application granted granted Critical
Publication of JPS626517Y2 publication Critical patent/JPS626517Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Control Of Temperature (AREA)
JP4120083U 1983-03-22 1983-03-22 試験材料の冷却温度制御装置 Granted JPS5934347U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4120083U JPS5934347U (ja) 1983-03-22 1983-03-22 試験材料の冷却温度制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4120083U JPS5934347U (ja) 1983-03-22 1983-03-22 試験材料の冷却温度制御装置

Publications (2)

Publication Number Publication Date
JPS5934347U JPS5934347U (ja) 1984-03-03
JPS626517Y2 true JPS626517Y2 (en]) 1987-02-14

Family

ID=30171795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4120083U Granted JPS5934347U (ja) 1983-03-22 1983-03-22 試験材料の冷却温度制御装置

Country Status (1)

Country Link
JP (1) JPS5934347U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5001423A (en) * 1990-01-24 1991-03-19 International Business Machines Corporation Dry interface thermal chuck temperature control system for semiconductor wafer testing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5445066Y2 (en]) * 1975-10-01 1979-12-24

Also Published As

Publication number Publication date
JPS5934347U (ja) 1984-03-03

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